Microelectromechanical systems (MEMS) offer numerous applications thanks to their miniaturization, low power consumption and tight integration with control and sense electronics. They are used in automotive, biomedical, aerospace and communication technologies to achieve different functions in sensing, actuating and controlling. However, these microsystems are subject to degradations and failure mechanisms which occur during their operation and impact their performances and consequently the performances of the systems in which they are used. These failures are due to different influence factors such as temperature, humidity, etc. The reliability of MEMS is then considered as a major obstacle for their development. In this context, it is necessary to continuously monitor them to assess their health status, detect abrupt faults, diagnose the causes of the faults, anticipate incipient degradations which may lead to complete failures and take appropriate decisions to avoid abnormal situations or negative outcomes. These tasks can be performed within Prognostics and Health Management (PHM) framework. This paper presents a hybrid PHM method based on physical and data-driven models and applied to a microgripper. The MEMS is first modeled in a form of differential equations. In parallel, accelerated life tests are performed to derive its degradation model from the acquired data. The nominal behavior and the degradation models are then combined and used to monitor the microgripper, assess its health state and estimate its Remaining Useful Life (RUL).
How to Cite
fault detection, Remaining useful Life, PHM, fault diagnostics, MEMS reliability, fault prognostics, accelerated life tests
Dardalhon, M. (2003). Contribution `a l’analyse de la fiabilité de microsyst`emes: prise en compte des contraintes liées `a l’environnement spatial. Unpublished doctoral dissertation, Montpellier 2, Université des Sciences et Techniques du Languedoc.
Hansen, J., R, Hall, L. S., D, & Kurtz, K. (1995). New approach to the challenge of machinery prognostics. Journal of Engineering for Gas Turbines and Power, 117, 320-325.
Howe, R. T. (1989). Microsensor and microactuator applications of thin films. Thin Solid Films, 181, 235-243. Huang, Y., Vasan, A. S. S., Doraiswami, R., Osterman, M., & Pecht, M. (2012). Mems reliability review. Device and Materials Reliability, IEEE Transactions on, 12, 482-493.
Jay, L., Fangji, W., Wenyu, Z., Masoud, G., Linxia, L., & David, S. (2014). Prognostics and health management design for rotary machinery systems reviews, methodology and applications. Mechanical Systems and Signal Processing, 42, 314-334.
Li, Y., & Jiang, Z. (2008). An overview of reliability and failure mode analysis of microelectromechanical systems (mems). In Handbook of performability engineering (p. 953-966).
Matmat, M. (2010). Pour une approche compl`ete de l’évaluation de fiabilité dans les microsyst`emes. Unpublished doctoral dissertation, INSA de Toulouse.
McMahon, M., & Jones, J. (2012). A methodology for accelerated testing by mechanical actuation of mems devices. Microelectronics Reliability, 52, 1382-1388.
Medjaher, K., Tobon-Mejia, D. A., & Zerhouni, N. (2012). Remaining useful life estimation of critical components with application to bearings. Reliability, IEEE Transactions on, 61, 292-302.
Merlijn van Spengen, W. (2003). Mems reliability from a failure mechanisms perspective. Microelectronics Reliability, 43, 1049-1060.
Mir, S., Rufer, L., & Dhayni, A. (2006). Built-in-self-test techniques for mems. Microelectronics journal, 37, 1591-1597.
M¨uller-Fiedler, R., Wagner, U., & Bernhard, W. (2002). Reliability of mems-a methodical approach. Microelectronics Reliability, 42, 1771-1776.
Ruan, J., Nolhier, N., Papaioannou, G., Trémouilles, D., Puyal, V., Villeneuve, C., . . . Plana, R. (2009). Accelerated lifetime test of rf-mems switches under esd stress. Microelectronics Reliability, 49, 1256–1259.
Shea, H. R. (2006). Reliability of mems for space applications. In Moems-mems 2006 micro and nanofabrication.
Tanner, D. (2009). Mems reliability: Where are we now? Microelectronics reliability, 49, 937-940.
Tanner, D. M., Smith, N. F., Irwin, L.W., Eaton, W. P., Helgesen, K., Clement, J., . . . others (2000). Mems reliability: infrastructure, test structures, experiments, and failure modes. SANDIA report, 155–157.
Walraven, J. A. (2005). Failure analysis issues in microelectromechanical systems (mems). Microelectronics Reliability, 45, 1750-1757.
Zaghloul, U., Papaioannou, G., Bhushan, B., Coccetti, F., Pons, P., & Plana, R. (2011). On the reliability of electrostatic nems/mems devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies. Microelectronics Reliability, 51, 1810-1818.
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